Rear mirrors (intra-cavity) for ArF (193nm), KrF (248nm),
or XeCl (308nm) excimer lasers
Calcium Fluoride or Magnesium Fluoride substrates
There are 193nm, 248nmm, & 308nm excimer lasers. These wavelengths find applications in micro-lithography, mircro-manfacturing and medical devices. At these wavelengths it is recommended to use Calcium Fluoride or Magnesium Fluoride substrates for intra-cavity transmissive optical elements. Note that Lambda’s high quality excimer laser cavity coatings are designed for Acid/Fluorine resistance.