Additional information
| Dimension | 0.5″ dia x 3.0mm t, 20.0mm dia x 3.6mm t, 1.0″ dia x 3.0mm t, 36.0mm dia. X 5.5mm t, 1.5″ dia x 5.5mm t, 2.0″ dia x 9.5mm t |
|---|---|
| Material | UV Grade CaF2, MgF2 |
| Wavelength | 193 nm, 248 nm, 308 nm |
Excimer Cavity Rear Mirrors (XRM)
- Rear mirrors (intra-cavity) for ArF (193nm), KrF (248nm),
- or XeCl (308nm) excimer lasers
- Calcium Fluoride or Magnesium Fluoride substrates
There are 193nm, 248nm, and 308nm excimer lasers. These wavelengths are found in applications such as micro-lithography, micro-manufacturing, and medical devices. At these wavelengths, it is recommended to use Calcium Fluoride or Magnesium Fluoride substrates for intra-cavity transmissive optical elements. Rear cavity mirrors provide at least 99.5% reflectance at the laser wavelength. Note that Lambda’s high quality excimer laser cavity coatings are designed for Acid/Fluorine resistance.
| Material: | UV grade MgF₂ UV grade CaF₂ |
| Surface Quality: | < 20 / 10 |
| Surface Flatness: | < λ / 10 @ 633 nm |
| Diameter Tolerance: | < + 0.00 / – 0.20 mm |
| Thickness Tolerance: | < ± 0.25 mm |
| Clear Aperture: | > 85% of diameter |
| Damage Threshold: | >1.2 J /cm², 10 ns |
| Durability: | Meet adhesion and abrasion per MIL-C-675 |
Excimer Cavity Rear Mirrors (XRM)
