Rear mirrors (intra-cavity) for ArF (193nm), KrF (248nm),
or XeCl (308nm) excimer lasers
Calcium Fluoride or Magnesium Fluoride substrates
There are 193nm, 248nm, and 308nm excimer lasers. These wavelengths are found in applications such as micro-lithography, micro-manufacturing, and medical devices. At these wavelengths, it is recommended to use Calcium Fluoride or Magnesium Fluoride substrates for intra-cavity transmissive optical elements. Rear cavity mirrors provide at least 99.5% reflectance at the laser wavelength. Note that Lambda’s high quality excimer laser cavity coatings are designed for Acid/Fluorine resistance.