Excimer Laser Cavity Output Couplers (XOC)

  • Output Coupler (intra-cavity) for 193nm, 248nm, 308nm excimer laser optics
  • Calcium Fluoride or Magnesium Fluoride substrates

There 193nm, 248nmm, & 308nm excimer lasers. These wavelengths find applications in micro-lithography, mircro-manfacturing and medical devices. At these wavelengths it is recommended to use Calcium Fluoride or Magnesium Fluoride substrates for intra-cavity transmissive optical elements. Rear cavity mirrors provide at least 99.5% reflectance at the laser wavelength. Output coupler reflectance may be specified by the user. Note that Lambda’s high quality excimer laser cavity coatings are designed for Acid/Fluorine resistance.
 

Material:
  • UV grade MgF2
  • UV grade CaF2
Surface Quality: < 20 / 10
Surface Flatness: < λ / 10 @ 633 nm
Diameter Tolerance: < + 0.00 / - 0.20 mm
Thickness Tolerance:: < ± 0.25 mm
Clear Aperture: > 85% of diameter
Damage Threshold: > 1.2 J /cm2, 10 ns
Durability: Meet adhesion and abrasion per MIL-C-675

 

To create a Lambda part number use the following :
 

 Product Type: 
 Dimension: 
 Material: 
 Reflectivity:  %
 Wavelength1:  nm
 Part Description: 
 Price:  US Dollars

If you have any questions, please contact the Lambda Sales Team.